Patent Assignment
Reel/Frame 038603/0356
Assignment of Assignor's Interest
Recorded: 2016-05-16
Pages: 4
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Spatial Light Modulation Element Module, Photolithographing Apparatus, Exposure Apparatus, Method of Manufacturing Spatial Light Modulation Element Module and Method of Manufacturing Device