Patent Assignment
Reel/Frame 038697/0945
Assignment of Assignor's Interest
Recorded: 2016-05-24
Pages: 7
Assignors
CHANG, CHIH-HANG
Executed: 2016-05-17
WANG, I-SHI
Executed: 2016-05-19
LIU, JEN-HAO
Executed: 2016-05-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Rough Layer for Better Anti-Stiction Deposition