Patent Assignment
Reel/Frame 038705/0243
Assignment of Assignor's Interest
Recorded: 2016-05-24
Pages: 2
Assignor
HUDSON, ERIC A.
Executed: 2016-05-23
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Technique to Deposit Sidewall Passivation for High Aspect Ratio Cylinder Etch