Patent Assignment
Reel/Frame 038726/0517
Assignment of Assignor's Interest
Recorded: 2016-05-26
Pages: 10
Assignors
KOMATSU, MITSUNORI
Executed: 2016-05-10
MARUYAMA, TORU
Executed: 2016-05-10
ISONO, YOSHINORI
Executed: 2016-05-10
YANAGI, HIROAKI
Executed: 2016-05-10
Assignee
EBARA CORPORATION
11-1 HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method for Detecting Abnormality of Substrate