Patent Assignment
Reel/Frame 038729/0937
Assignment of Assignor's Interest
Recorded: 2016-05-26
Pages: 7
Assignors
SUZUKI, KENJI
Executed: 2016-04-22
HOTTA, TAKANOBU
Executed: 2016-04-27
MAEKAWA, KOJI
Executed: 2016-04-25
AIBA, YASUSHI
Executed: 2016-05-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Reducing Stress in Metal Film and Metal Film Forming Method