Patent Assignment
Reel/Frame 038730/0417
Assignment of Assignor's Interest
Recorded: 2016-05-26
Pages: 4
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Filling a Cavity in a Substrate Using Sputtering and Deposition