Patent Assignment
Reel/Frame 038737/0888
Assignment of Assignor's Interest
Recorded: 2016-05-27
Pages: 8
Assignors
SAWATAISHI, MASAYUKI
Executed: 2016-05-03
MIWA, TOMONORI
Executed: 2016-05-09
KANEKO, YUKI
Executed: 2016-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method