Patent Assignment
Reel/Frame 038764/0354
Assignment of Assignor's Interest
Recorded: 2016-06-01
Pages: 4
Assignors
BENJAMIN, NEIL MARTIN PAUL
Executed: 2016-05-24
POVOLNY, HENRY
Executed: 2016-05-18
RICCI, ANTHONY J.
Executed: 2016-05-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control