Patent Assignment
Reel/Frame 038800/0910
Assignment of Assignor's Interest
Recorded: 2016-06-03
Pages: 7
Assignors
COLLINS, JOSHUA
Executed: 2016-05-31
NEO, SIEW
Executed: 2016-05-31
BAMNOLKER, HANNA
Executed: 2016-06-01
SAWLANI, KAPIL UMESH
Executed: 2016-06-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Deposition of Tungsten for Enhanced Fill and Reduced Substrate Attack