Patent Assignment
Reel/Frame 038809/0180
Assignment of Assignor's Interest
Recorded: 2016-06-05
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Silicon-Containing Photoresist for Lithography