Patent Assignment
Reel/Frame 038834/0170
Assignment of Assignor's Interest
Recorded: 2016-06-07
Pages: 8
Assignors
YU, KAI-HUNG
Executed: 2016-06-03
LEUSINK, GERRIT J.
Executed: 2016-06-03
WAJDA, CORY
Executed: 2016-06-06
ISHIZAKA, TADAHIRO
Executed: 2016-06-06
HAKAMATA, TAKAHIRO
Executed: 2016-06-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Ruthenium Metal Feature Fill for Interconnects