Patent Assignment
Reel/Frame 038834/0724
Assignment of Assignor's Interest
Recorded: 2016-06-07
Pages: 2
Assignors
IGUCHI, KENICHI
Executed: 2016-04-27
NAKAZAWA, HARUO
Executed: 2016-04-27
OGINO, MASAAKI
Executed: 2016-04-27
Assignee
FUJI ELECTRIC CO., LTD.
1-1, TANABESHINDEN, KAWASAKI-KU, KAWASAKI-SHI, KANAGAWA, 210-9530, JAPAN
Covered Property
(1)
Impurity Adding Apparatus, Impurity Adding Method, and Semiconductor Element Manufacturing Method