Patent Assignment
Reel/Frame 038841/0363
Assignment of Assignor's Interest
Recorded: 2016-06-08
Pages: 11
Assignors
CHENG, SHYH-WEI
Executed: 2016-06-01
WANG, CHIH-YU
Executed: 2016-06-01
HSU, HSI-CHENG
Executed: 2016-06-01
CHEN, HSIN-YU
Executed: 2016-06-01
CHIANG, JI-HONG
Executed: 2016-06-01
WENG, JUI-CHUN
Executed: 2016-06-01
WU, WEI-DING
Executed: 2016-06-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Heater Design for Mems Chamber Pressure Control