Patent Assignment
Reel/Frame 038858/0382
Assignment of Assignor's Interest
Recorded: 2016-06-09
Pages: 18
Assignors
RUFFELL, SIMON
Executed: 2016-05-25
DAI, HUIXIONG
Executed: 2016-06-09
LANG, JUN
Executed: 2016-05-27
HAUTALA, JOHN
Executed: 2016-05-25
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Manipulating Patterned Features Using Ions