Patent Assignment
Reel/Frame 038862/0826
Change of Name
Recorded: 2016-06-09
Pages: 3
Assignors
NIEN, PO-CHIN
Executed: 2016-03-25
HONG, WILLIAM WEILUN
Executed: 2016-03-25
CHEN, YING-TSUNG
Executed: 2016-03-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Planarization Control in Semiconductor Manufacturing Process