Patent Assignment
Reel/Frame 038877/0958
Assignment of Assignor's Interest
Recorded: 2016-06-10
Pages: 4
Assignors
OGIHARA, TSUTOMU
Executed: 2016-05-13
KORI, DAISUKE
Executed: 2016-05-13
HATAKEYAMA, JUN
Executed: 2016-05-13
KOBAYASHI, NAOKI
Executed: 2016-05-15
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Composition for Forming Resist Underlayer Film and Patterning Process