Patent Assignment
Reel/Frame 038896/0301
Assignment of Assignor's Interest
Recorded: 2016-06-13
Pages: 3
Assignors
TOMURA, MAJU
Executed: 2016-06-01
TAKEDA, RYOHEI
Executed: 2016-06-01
TAKASHIMA, RYUICHI
Executed: 2016-06-01
OOYA, YOSHINOBU
Executed: 2016-06-01
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Plasma Processing Apparatus