Patent Assignment
Reel/Frame 038927/0035
Assignment of Assignor's Interest
Recorded: 2016-06-16
Pages: 5
Assignors
UM, JUNG-HWAN
Executed: 2016-04-15
PARK, SUNG-MOON
Executed: 2016-04-15
KIM, DONG-WOOK
Executed: 2016-04-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129 SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Dielectric Window, Plasma Processing System Including the Window, and Method of Fabricating Semiconductor Device Using the System