Patent Assignment
Reel/Frame 038930/0318
Assignment of Assignor's Interest
Recorded: 2016-06-16
Pages: 4
Assignors
SAWACHI, ATSUSHI
Executed: 2016-05-24
AMIKURA, NORIHIKO
Executed: 2016-05-24
SATO, YOSHIYASU
Executed: 2016-05-24
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Supply System, Gas Supply Control Method and Gas Replacement Method