Patent Assignment
Reel/Frame 038930/0522
Assignment of Assignor's Interest
Recorded: 2016-06-16
Pages: 5
Assignors
HIDAKA, AKIRA
Executed: 2016-06-02
KIMURA, SOICHIRO
Executed: 2016-06-02
SUGIMOTO, MASARU
Executed: 2016-06-02
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method