Patent Assignment
Reel/Frame 038955/0109
Assignment of Assignor's Interest
Recorded: 2016-06-20
Pages: 4
Assignors
KULSHRESHTHA, PRASHANT KUMAR
Executed: 2016-06-03
DUAN, ZIQING
Executed: 2016-06-02
KHAJA, ABDUL AZIZ
Executed: 2016-06-02
YE, ZHENG JOHN
Executed: 2016-06-15
BANSAL, AMIT KUMAR
Executed: 2016-06-02
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Graded in-Situ Charge Trapping Layers to Enable Electrostatic Chucking and Excellent Particle Performance for Boron-Doped Carbon Films