Assignment of Assignor's Interest

Recorded: 2016-06-21 Pages: 3

Assignors

NAKAMURA, TAKASHI

Executed: 2016-06-13

NISHIMURA, RIEKO

Executed: 2016-06-13

Assignee

NUFLARE TECHNOLOGY, INC.

8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN

Covered Property (1)

Adjustment Method for Charged Particle Beam Drawing Apparatus and Charged Particle Beam Drawing Method

Patent: 9,659,746 →

Application: 15/188,007 →

Publication: US 2017/0011884