Patent Assignment
Reel/Frame 038975/0144
Assignment of Assignor's Interest
Recorded: 2016-06-21
Pages: 3
Assignor
DEVILLIERS, ANTON J.
Executed: 2016-06-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods of Forming a Mask for Substrate Patterning