Patent Assignment
Reel/Frame 038984/0008
Assignment of Assignor's Interest
Recorded: 2016-06-22
Pages: 5
Assignors
YAMAMOTO, TAKARI
Executed: 2016-06-06
MASUDA, NORIIKI
Executed: 2016-06-06
NAKAMURA, KENICHIRO
Executed: 2016-06-13
KOIZUMI, HIROSHI
Executed: 2016-06-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Control Method