Patent Assignment
Reel/Frame 038985/0189
Assignment of Assignor's Interest
Recorded: 2016-06-22
Pages: 6
Assignors
SRIRAMAN, SARAVANAPRIYAN
Executed: 2016-06-06
WISE, RICHARD
Executed: 2016-06-14
SINGH, HARMEET
Executed: 2016-06-14
PATERSON, ALEX
Executed: 2016-06-16
BAILEY, ANDREW D., III
Executed: 2016-06-06
VAHEDI, VAHID
Executed: 2016-06-20
GOTTSCHO, RICHARD A.
Executed: 2016-06-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Photoresist Design Layout Pattern Proximity Correction Through Fast Edge Placement Error Prediction via a Physics-Based Etch Profile Modeling Framework