Patent Assignment
Reel/Frame 038998/0910
Assignment of Assignor's Interest
Recorded: 2016-06-23
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
1, YASUUCHI 2-CHOME, YATSUO-MACHI, TOYAMA-SHI, 939-2393, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.