Patent Assignment
Reel/Frame 039003/0342
Assignment of Assignor's Interest
Recorded: 2016-06-24
Pages: 7
Assignors
HUANG, CHIA-CHING
Executed: 2013-09-17
HSU, CHIA-HAO
Executed: 2013-09-17
CHEN, CHIA-CHEN
Executed: 2013-09-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Overlay in Extreme Ultra-Violet (Euv) Lithography