Patent Assignment
Reel/Frame 039008/0214
Assignment of Assignor's Interest
Recorded: 2016-06-24
Pages: 5
Assignors
TSAI, CHENG-YEN
Executed: 2016-06-03
LEE, HSIN-YI
Executed: 2016-06-03
WU, CHUNG-CHIANG
Executed: 2016-06-03
LEE, DA-YUAN
Executed: 2016-06-03
CHANG, WENG
Executed: 2016-06-13
TSAI, MING-HSING
Executed: 2016-06-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6 SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Methods for Pre-Deposition Treatment of a Work-Function Metal Layer