Patent Assignment
Reel/Frame 039027/0705
Assignment of Assignor's Interest
Recorded: 2016-06-28
Pages: 5
Assignors
AKASAKA, HIROSHI
Executed: 2016-06-07
IKEDA, MASAYOSHI
Executed: 2016-06-22
KIMURA, KAZUHIRO
Executed: 2016-06-07
KAMIYA, YASUSHI
Executed: 2016-06-06
TOYOSATO, TOMOHIKO
Executed: 2016-06-21
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA, 215-8550, JAPAN
Covered Property
(1)
Substrate Processing Method and Method of Manufacturing Semiconductor Device