Patent Assignment
Reel/Frame 039032/0405
Assignment of Assignor's Interest
Recorded: 2016-06-28
Pages: 3
Assignors
SRINIVASAN, SWAMINATHAN T.
Executed: 2015-03-26
KHAJA, FAREEN ADENI
Executed: 2015-03-26
SANCHEZ, ERROL ANTONIO C.
Executed: 2015-04-07
MARTIN, PATRICK M.
Executed: 2015-03-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Utlization of Angled Trench for Effective Aspect Ratio Trapping of Defects in Strain-Relaxed Heteroepitaxy of Semiconductor Films