Patent Assignment
Reel/Frame 039057/0418
Assignment of Assignor's Interest
Recorded: 2016-06-30
Pages: 3
Assignors
OKUMURA, TOMONORI
Executed: 2016-06-20
AJISHI, TAKASHI
Executed: 2016-06-20
TSUGAO, KEISUKE
Executed: 2016-06-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method for Detecting Clogging of Exhaust Pipe in Substrate Processing Apparatus