Patent Assignment
Reel/Frame 039061/0197
Assignment of Assignor's Interest
Recorded: 2016-06-30
Pages: 4
Assignors
MATSUSHIMA, HIDEAKI
Executed: 2016-05-23
ONOZAWA, ICHIRO
Executed: 2016-05-25
YAJIMA, WATARU
Executed: 2016-05-23
Assignee
SHIN-ETSU HANDOTAI CO., LTD.
2-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Recovering and Purifying Argon Gas from Silicon Single Crystal Manufacturing Apparatus and Apparatus for Recovering and Purifying Argon Gas