Patent Assignment
Reel/Frame 039064/0607
Assignment of Assignor's Interest
Recorded: 2016-07-01
Pages: 4
Assignors
ZHANG, TAO
Executed: 2016-06-20
TIAN, SIYUAN
Executed: 2016-06-20
PAPE, ERIC A.
Executed: 2016-06-28
ZANINOVICH, JORGE JOSE
Executed: 2016-06-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System and Method for Substrate Support Feed-Forward Temperature Control Based on Rf Power