Patent Assignment
Reel/Frame 039100/0849
Assignment of Assignor's Interest
Recorded: 2016-07-07
Pages: 3
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Methods and Apparatus for Calculating Electromagnetic Scattering Properties of a Structure and for Estimation of Geometrical and Material Parameters thereof