Patent Assignment
Reel/Frame 039102/0949
Assignment of Assignor's Interest
Recorded: 2016-07-07
Pages: 6
Assignors
NABETA, KAZUYA
Executed: 2016-06-30
UKAE, NAOKI
Executed: 2016-06-30
TAKESHITA, MITSUNORI
Executed: 2016-06-30
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.