Patent Assignment
Reel/Frame 039112/0386
Assignment of Assignor's Interest
Recorded: 2016-07-08
Pages: 6
Assignors
KARIM, ISHTAK
Executed: 2016-04-28
CHO, KIYONG
Executed: 2016-04-28
LAVOIE, ADRIEN
Executed: 2016-04-28
KUMAR, PURUSHOTTAM
Executed: 2016-04-28
QIAN, JUN
Executed: 2016-04-28
GULIANI, JASWINDER
Executed: 2016-06-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Variable Cycle and Time Rf Activation Method for Film Thickness Matching in a Multi-Station Deposition System
Application:
15/143,338 →
Publication:
US 2017/0314129