Patent Assignment
Reel/Frame 039116/0403
Assignment of Assignor's Interest
Recorded: 2016-07-11
Pages: 4
Assignors
YANG, SU-CHUN
Executed: 2016-07-04
HSIAO, YI-LI
Executed: 2016-07-04
SHAO, TUNG-LIANG
Executed: 2016-07-04
TUNG, CHIH-HANG
Executed: 2016-07-04
YU, CHEN-HUA
Executed: 2016-07-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Thinning Process Using Metal-Assisted Chemical Etching