Patent Assignment
Reel/Frame 039151/0053
Assignment of Assignor's Interest
Recorded: 2016-07-13
Pages: 4
Assignors
CHAO, YI-CHENG
Executed: 2016-03-08
CHANG, CHE-CHENG
Executed: 2016-03-08
WU, PO-CHI
Executed: 2016-03-08
LI, JUNG-JUI
Executed: 2016-03-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Semiconductor Fabrication with Height Control Through Active Region Profile