Patent Assignment
Reel/Frame 039156/0733
Assignment of Assignor's Interest
Recorded: 2016-07-14
Pages: 3
Assignors
GODA, KAZUYA
Executed: 2016-07-07
AMANO, YOSHIFUMI
Executed: 2016-07-07
YAMAMOTO, NOBUYA
Executed: 2016-07-07
AYABE, GO
Executed: 2016-07-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus