Patent Assignment
Reel/Frame 039167/0636
Assignment of Assignor's Interest
Recorded: 2016-07-15
Pages: 8
Assignors
LIU, YU-CHIA
Executed: 2016-07-13
CHU, CHIA-HUA
Executed: 2016-07-13
CHENG, CHUN-WEN
Executed: 2016-07-13
PENG, JUNG-HUEI
Executed: 2016-07-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Semiconductor Structure for Mems Device