Patent Assignment
Reel/Frame 039183/0238
Assignment of Assignor's Interest
Recorded: 2016-07-19
Pages: 6
Assignors
PAUL, KHOKAN C.
Executed: 2016-07-11
BUDIARTO, EDWARD
Executed: 2016-06-21
EGAN, TODD
Executed: 2016-06-21
VAEZ-IRAVANI, MEHDI
Executed: 2016-06-21
LEE, JEONGMIN
Executed: 2016-06-28
DU BOIS, DALE R.
Executed: 2016-06-21
LEE, TERRANCE Y.
Executed: 2016-06-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
In-Situ Metrology Method for Thickness Measurement During Pecvd Processes