Patent Assignment
Reel/Frame 039189/0060
Assignment of Assignor's Interest
Recorded: 2016-07-19
Pages: 5
Assignors
NGUYEN, ANDREW
Executed: 2016-06-01
YANG, YANG
Executed: 2016-06-01
RAMASWAMY, KARTIK
Executed: 2016-06-01
LANE, STEVEN
Executed: 2016-06-01
WONG, LAWRENCE
Executed: 2016-06-03
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Controlling Plasma Near the Edge of a Substrate