Patent Assignment
Reel/Frame 039202/0187
Assignment of Assignor's Interest
Recorded: 2016-07-20
Pages: 4
Assignors
TAKEAKI, REI
Executed: 2016-07-13
ANDO, KOJI
Executed: 2016-07-14
MAEGAWA, TADASHI
Executed: 2016-07-13
YASUTAKE, YOSUKE
Executed: 2016-07-13
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus