Patent Assignment
Reel/Frame 039220/0695
Assignment of Assignor's Interest
Recorded: 2016-07-22
Pages: 10
Assignors
HASHIMOTO, YOSHITOMO
Executed: 2016-07-11
HIROSE, YOSHIRO
Executed: 2016-07-12
NOHARA, SHINGO
Executed: 2016-07-14
SASAJIMA, RYOTA
Executed: 2016-07-13
HARADA, KATSUYOSHI
Executed: 2016-07-11
URANO, YUJI
Executed: 2016-07-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.