Patent Assignment
Reel/Frame 039249/0089
Assignment of Assignor's Interest
Recorded: 2016-07-25
Pages: 3
Assignors
FUJIMURA, AKIRA
Executed: 2013-05-13
AADAMOV, ANATOLY
Executed: 2013-07-24
KHALIULLIN, ELDAR
Executed: 2013-05-21
BORK, INGO
Executed: 2013-05-20
Assignee
D2S, INC.
4040 MOORPARK AVENUE, #250, SAN JOSE, CALIFORNIA, 95117
Covered Property
(1)
Method and System for Forming Patterns Using Charged Particle Beam Lithography