Patent Assignment
Reel/Frame 039254/0512
Assignment of Assignor's Interest
Recorded: 2016-07-26
Pages: 7
Assignors
PETRY, KLAUS
Executed: 2016-07-14
SCHALLER, JASON M.
Executed: 2016-07-19
MORADIAN, ALA
Executed: 2016-07-19
EVANS, MORGAN D.
Executed: 2016-07-19
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Semiconductor Workpiece Temperature Measurement System