Patent Assignment
Reel/Frame 039264/0234
Assignment of Assignor's Interest
Recorded: 2016-07-26
Pages: 4
Assignor
MIEHER, WALTER DEAN
Executed: 2016-06-02
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Focus Determination Using Focus-Sensitive Overlay Targets