Patent Assignment
Reel/Frame 039272/0552
Assignment of Assignor's Interest
Recorded: 2016-07-27
Pages: 4
Assignor
KAMAKURA, TSUKASA
Executed: 2016-07-04
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.