Patent Assignment
Reel/Frame 039273/0459
Assignment of Assignor's Interest
Recorded: 2016-07-27
Pages: 4
Assignors
CHENG, CHUNG-LIANG
Executed: 2014-06-04
CHEN, YEN-YU
Executed: 2014-06-04
LEE, CHANG-SHENG
Executed: 2014-06-04
ZHANG, WEI
Executed: 2014-06-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Chemical-Mechanical Planarization System