Patent Assignment
Reel/Frame 039292/0194
Assignment of Assignor's Interest
Recorded: 2016-07-29
Pages: 3
Assignors
ZHANG, HANSHEN
Executed: 2016-06-03
LIU, JIE
Executed: 2016-06-06
CUI, ZHENJIANG
Executed: 2016-06-03
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Two-Step Fluorine Radical Etch of Hafnium Oxide